Electromagnetic actuator

ABSTRACT

The electromagnetic actuator is a linear electromagnetic actuator in which the relative position between a slide table that supports permanent magnets thereon and a guide rail that supports a coil, which is arranged in confronting relation to the permanent magnets, is displaced by means of a thrust force generated by a current flowing through the coil. The coil is disposed on the guide rail through a low coercive force magnetizable material body, the coercive force of which is lower than a predetermined value. Consequently, generation of residual magnetization can be suppressed, and an influence on the thrust force caused by such residual magnetization can also be suppressed.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a division of and is based upon and claims thebenefit of priority under 35 U.S.C. §120 for U.S. Ser. No. 12/871,492,filed Aug. 30, 2010, and claims the benefit of priority under 35 U.S.C.§119 from Japanese Patent Application No. 2009-202120, filed Sep. 1,2009, and Japanese Patent Application No. 2010-158543, filed Jul. 13,2010, the entire contents of each of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electromagnetic actuator that uses acoil and permanent magnets.

2. Description of the Related Art

A linear electromagnetic actuator is known, which enables generation ofmagnetic saturation in a yoke to be suppressed, by forming first andsecond projections that face toward a guide rail from both sides of aslide table (see, Japanese Laid-Open Patent Publication No.2006-187192).

Because it is required for the guide rail to have significant hardness,the hardness of the guide rail is preserved to a large degree by thematerials used, and by heat treatment. However, when the guide rail isfabricated with large hardness, the coercive force as well as hysteresisin the guide rail also becomes greater. As a result, when the permanentmagnets move over the guide rail accompanying movement of the slidetable, residual magnetization is generated in the guide rail. From theeffect of such residual magnetization, braking forces are generated in adirection opposite to the direction of movement of the permanentmagnets. As a result of generation of such braking forces, the thrustforce in the movement direction becomes smaller. Further, whenpositioning of the slide table is controlled, the coercive force causesoscillations, and accuracy in positioning of the slide table isdeteriorated.

SUMMARY OF THE INVENTION

The present invention has been made in consideration of theaforementioned disadvantages, and has the object of providing anelectromagnetic actuator that can suppress the influence of residualmagnetization on thrust force, and which further enables accuracy inpositioning of a slide table to be assured.

To achieve the aforementioned objects, the present invention ischaracterized by an electromagnetic actuator, which causes relativepositional displacement between a first yoke supporting a permanentmagnet and a second yoke supporting a coil arranged to confront thepermanent magnet, by means of a thrust force that is generated due to acurrent that flows through the coil, and wherein the coil is disposed onthe second yoke through a low coercive force magnetizable material body,the coercive force of which is lower than a predetermined value.

A first projection and a second projection may be formed on opposite endsides of the second yoke facing toward the first yoke and projectingalong a displacement direction, and the first yoke may be disposedbetween the first projection and the second projection.

A third projection and a fourth projection may be formed on opposite endsides of the first yoke facing toward the second yoke and projectingalong a displacement direction, such that the third projection and thefourth projection are separated from the second yoke. A first guidemember may be interposed between the third projection and the secondyoke, and a second guide member may be interposed between the fourthprojection and the second yoke.

The first projection and the second projection may be formed on oppositeend sides of the second yoke facing toward the first yoke and projectingalong the third projection and the fourth projection. The first guidemember may be interposed between the first projection and the thirdprojection, and the second guide member may be interposed between thesecond projection and the fourth projection.

The first yoke and the second yoke may be arranged in confrontingrelation to each other, such that the permanent magnet is positioned ona side of the first yoke that faces the second yoke, and the coil ispositioned on a side of the second yoke that faces the first yoke.

The coil may comprise an open center coil formed by an insulatingmaterial.

At least one of the first projection and the second projection of thefirst yoke and the second yoke may be subjected to heat treatment inorder to impart hardness thereto.

On a surface of the second yoke that faces toward the permanent magnet,at least a region thereof that is magnetized by the permanent magnet maycomprise a region on which heat treatment to impart hardness is notimplemented.

The low coercive force magnetizable material body may comprise at leastone of pure iron, magnetic steel, low-carbon steel, a cobalt alloy, andan amorphous alloy.

The low coercive force magnetizable material body may be formed in aplate-like shape.

A thickness of the low coercive force magnetizable material body may bedetermined corresponding to an allowable hysteresis value.

To achieve the aforementioned objects, the present invention further ischaracterized by an electromagnetic actuator, which causes relativepositional displacement between a first yoke supporting a permanentmagnet and a second yoke supporting a coil arranged to confront thepermanent magnet, by means of a thrust force that is generated due to acurrent that flows through the coil, and wherein, on a surface of thesecond yoke that faces toward the permanent magnet, at least a regionthereof that is magnetized by the permanent magnet comprises a region onwhich heat treatment to impart hardness is not implemented.

The surface of the second yoke that faces toward the permanent magnetmay comprise a region on which heat treatment to impart hardness is notimplemented.

A first projection and a second projection may be formed on opposite endsides of the second yoke facing toward the first yoke and projectingalong a displacement direction. The first yoke may be disposed betweenthe first projection and the second projection, and at least one of thefirst projection and the second projection may be subjected to heattreatment in order to impart hardness thereto.

A third projection and a fourth projection may be formed on opposite endsides of the first yoke facing toward the second yoke and projectingalong the first projection and the second projection. The thirdprojection and the fourth projection may be separated from the secondyoke. A first guide member may be interposed between the firstprojection and the third projection, and a second guide member may beinterposed between the second projection and the fourth projection.

The first yoke, or the third projection and the fourth projection of thefirst yoke, may be subjected to heat treatment in order to imparthardness thereto.

The heat treatment may comprise any one of high frequency hardening,carburizing and quenching, and vacuum hardening.

A plurality of rolling bodies may be included within the first guidemember and the second guide member, at least a portion of the pluralityof rolling bodies comprising first rolling bodies made of a magneticmaterial.

The first rolling bodies and second rolling bodies made of anon-magnetic material may be included within the first guide member andthe second guide member, wherein the first rolling bodies and the secondrolling bodies are disposed alternately along the displacementdirection.

According to the present invention, since a low coercive forcemagnetizable material body is disposed between the coil and the secondyoke, generation of residual magnetization can be suppressed. As thegeneration of residual magnetization is suppressed, the influence of theresidual magnetization on thrust force is also suppressed. Consequently,since the first yoke can be moved accurately, it is possible to providean electromagnetic actuator improved in accuracy in positioning of thefirst yoke.

Further, according to the present invention, since a region that ismagnetized by a permanent magnet on a surface of the second yoke facingtoward the permanent magnet is not subjected to a heat treatment forimparting hardness, generation of residual magnetization can besuppressed. As the generation of residual magnetization is suppressed,the influence of the residual magnetization on thrust force is alsosuppressed. Consequently, since the first yoke can be moved accurately,it is possible to provide an electromagnetic actuator improved inaccuracy in positioning of the first yoke.

The above and other objects, features, and advantages of the presentinvention will become more apparent from the following description whentaken in conjunction with the accompanying drawings in which a preferredembodiment of the present invention is shown by way of illustrativeexample.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of a linear electromagnetic actuatoraccording to a present embodiment of the invention;

FIG. 2 is an exploded perspective view of the linear electromagneticactuator shown in FIG. 1;

FIG. 3 is a cross sectional view taken along arrows III-III shown inFIG. 1;

FIG. 4 is a cross sectional view taken along arrows IV-IV shown in FIG.1;

FIGS. 5A to 5C are schematic views for explaining the principles bywhich braking forces are generated that impede the thrust force of aslide table, wherein FIG. 5A shows magnetic poles generated in amagnetizable material body at a time when a movable section is stopped,FIG. 5B shows magnetic poles generated in a magnetizable material bodyby movement of the movable section in the direction of an arrow B1 in acase where the coercive force of the magnetizable material body issmall, and FIG. 5C shows magnetic poles generated in the magnetizablematerial body by movement of the movable section in the direction of thearrow B1 in a case where the coercive force of the magnetizable materialbody is large;

FIG. 6 is a diagram showing the relationship between the position andmovement direction of a slide table and deviation in thrust force of theslide table, for a case in which a low coercive force magnetizablematerial body is not disposed between a guide rail and a coil;

FIG. 7 is a diagram showing the relationship between the position andmovement direction of the slide table and deviation in thrust force ofthe slide table, for a case in which a low coercive force magnetizablematerial body having a constant thickness (e.g., 0.5 mm) is disposedbetween the guide rail and the coil;

FIG. 8 is a diagram showing the relationship between the position andmovement direction of the slide table and deviation in thrust force ofthe slide table, for a case in which two low coercive force magnetizablematerial bodies of the type shown in FIG. 7 are stacked and the two lowcoercive force magnetizable material bodies are disposed between theguide rail and the coil;

FIG. 9 is a diagram showing hysteresis in the thrust force due tomovement of the slide table for the respective cases of FIGS. 6 through8;

FIG. 10 is a perspective view of a linear electromagnetic actuatoraccording to a second modified example, in which the view shows anexample of a region on the guide rail (shown in hatching) where heattreatment is implemented; and

FIG. 11 is a perspective view of a linear electromagnetic actuatoraccording to a third modified example, in which the view shows anexample of a region on the guide rail (shown in hatching) that ismagnetized by permanent magnets.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

A preferred embodiment of an electromagnetic actuator according to thepresent invention shall be explained in detailed below with reference tothe accompanying drawings. Concerning the present embodiment, anexplanation shall be made in which the electromagnetic actuator of thepresent invention is applied to a linear electromagnetic actuator.

FIG. 1 is a perspective view of a linear electromagnetic actuator 10according to the present embodiment, FIG. 2 is an exploded perspectiveview of the linear electromagnetic actuator 10, FIG. 3 is a crosssectional view taken along arrows III-III of FIG. 1, and FIG. 4 is across sectional view taken along arrows IV-IV of FIG. 1.

The linear electromagnetic actuator 10 is equipped with a fixed section14 and a movable section 18 disposed in confronting relation to thefixed section 14. The fixed section 14 comprises a guide rail 20 (secondyoke), a low coercive force magnetizable material body 36 having acoercive force smaller than a predetermined value (e.g., 500 A/m), acoil 12, a circuit substrate 26, and a stopper 60. The movable section18 comprises a slide table 46 (first yoke), an elongate plate shapedmember 70, an end block 72, two permanent magnets 16 a, 16 b, a scale48, and a stopper 73.

The yokes, which are formed as the guide rail 20 and the slide table 46,may be formed from martensitic stainless steel (e.g., SUS440C or thelike), carbon steel (e.g., S55C or the like), or chrome molybdenum steel(e.g., SCM415 or the like). Heat treatment in order to impart hardnessthereto is implemented on the guide rail 20 and the slide table 46. Forexample, if the yokes are formed from (martensitic) stainless steel, theyokes are hardened by implementing a vacuum quenching and temperingtreatment thereto. Further, if the yokes are formed from carbon steel,the yokes are hardened by implementing a high frequency quenching andtempering treatment thereto, and if the yokes are formed from chromemolybdenum steel, the yokes are hardened by implementing a carburizingquenching and tempering treatment thereto. Yokes that are formed frommartensitic stainless steel, carbon steel, or chrome molybdenum steeldevelop a higher coercive force as a result of being subjected toheating treatment for hardening, and become magnetizable materials thatexhibit a high coercive force. Over the entire guide rail 20 and slidetable 46 are subjected to the heat treatment.

The guide rail 20 is U-shaped in cross section, and further supportsthereon both the coil 12 and the low coercive force magnetizablematerial body 36. The low coercive force magnetizable material body 36is disposed on the guide rail 20. The low coercive force magnetizablematerial body 36 may be formed from pure iron (SUY), or from magneticsteel. Pure iron is defined as iron that does not include any impuritiestherein, however, since it is difficult in practice to manufacture pureiron, iron in which the purity level thereof is higher than apredetermined value may be utilized. Further, the low coercive forcemagnetizable material body 36 may be formed in a plate-like shape.Moreover, the low coercive force magnetizable material body 36 may beformed from low-carbon steel, a nickel alloy such as permalloy or thelike, a cobalt alloy such as permendur or the like, or an amorphousalloy.

The coil 12 is an open center coil form by winding conductive wirecovered by an insulative layer, and molding it with an insulativematerial body 34 made of resin. The coil 12 is disposed at a roughlycentral portion on an upper surface of the low coercive forcemagnetizable material body 36.

An encoder 22 and an electronic circuit 24 are mounted on the circuitsubstrate 26, which is formed from a resin material. The circuitsubstrate 26 is disposed on the upper surface of the low coercive forcemagnetizable material body 36, on a side in the direction of the arrowA1 from the coil 12. The circuit substrate 26 is disposed on the lowcoercive force magnetizable material body 36 through screws 44, whichare screw-inserted into holes 38 formed in the circuit substrate 26.

The electronic circuit 24 is connected respectively to the wire of thecoil 12 and to the encoder 22. The electronic circuit 24 causes acurrent to flow through the wire based on a control signal from anon-illustrated external apparatus, and also outputs to the externalapparatus electrical signals that are input thereto from the encoder 22.The encoder 22 is arranged so as to face toward a scale 48, which isdisposed on a lower surface of the slide table 46.

The encoder 22 faces toward the scale 48 and illuminates the scale 48with light, and further receives reflected light from the scale 48 as aresult of the illuminated light. In the case that the movable section 18is displaced in the direction of the arrow A (displacement direction),the reflected light amount varies, and therefore based on the lightamount of the received reflected light, the displacement amount of themovable section 18 is calculated, and the calculation result is outputas an electric signal to the electronic circuit 24. Although not shownin detail, the encoder 22 includes at least an illuminating section forilluminating light, a light receiving section for receiving light, and adisplacement calculating section for calculating a displacement amountbased on an electric load corresponding to the light received by thelight receiving section.

On opposite sides of the guide rail 20, projections (first and secondprojections) 28 a, 28 b are formed to project from the base toward themovable section 18, and on inner sides of each of the projections 28 a,28 b, guide grooves 30 a, 30 b are formed, which extend along thedirection of the arrow A shown in FIGS. 1 through 3. A plurality ofballs (first and second guide members) 32 are disposed as rolling bodiesin the guide grooves 30 a, 30 b. In this case, the guide rail 20 isformed to be wider than the slide table 46 of the movable section 18,with the slide table 46 being arranged between the respectiveprojections 28 a, 28 b of the guide rail 20. The wall thickness of theguide rail 20 and the projections 28 a, 28 b is formed to be thinnerthan a wall thickness d (see FIG. 3) in the direction of the arrow A ofthe permanent magnets 16 a, 16 b. Moreover, the first and second guidemembers 32 may comprise a plurality of rolling bodies in the form ofcylinders or columns.

On opposite end sides of the low coercive force magnetizable materialbody 36, cross sectionally U-shaped ball latch members 52, 56 whichprevent the balls 32 from dropping out, are affixed respectively byscrews 54, 58.

The stopper 60 is affixed to the upper surface of the low coercive forcemagnetizable material body 36 by a screw 62. When the movable section 18is displaced in the direction of the arrow A1, the stopper 60 restrictsfurther displacement of the movable section 18. More specifically, byabutment against a side surface of the end block 72 connected to theother end of the slide table 46, the stopper 60 prevents displacementtoward the side of the arrow A1 direction of the guide rail 20 of themovable section 18. The end block 72 is affixed by unillustrated screwsto the other end in the direction of the arrow A2 of the slide table 46.In FIGS. 1 to 3, the stopper 60 and the end block 72 abut against eachother, and a condition occurs in which the movable section 18 isprevented from displacement in the direction of the arrow A1.

The slide table 46 is formed with a U-shape in cross section, with thethickness of the slide table 46 being set to be smaller than the widthof the guide rail 20. On opposite side portions of the slide table 46,respective projections (third and fourth projections) 74 a, 74 b areformed, which project toward the fixed section 14 from the base thereof.The projections 74 a, 74 b are formed to project from the guide rail 20while being separated therefrom. On outer sides of each of theprojections 74 a, 74 b, guide grooves 76 a, 76 b are formed, in whichthe balls 32 can be arranged along the direction of the arrow A. Theslide table 46 and the guide rail 20 are connected to each other throughthe balls 32 (see FIG. 4).

More specifically, with the linear electromagnetic actuator 10, theguide rail 20 and the slide table 46 are arranged such that the guidegrooves 76 a, 76 b and the guide grooves 30 a, 30 b are positionedapproximately at the same height, and the plurality of balls 32 areaccommodated as a linear guide of a limited length in the space that isformed by the guide grooves 76 a, 76 b and the guide grooves 30 a, 30 b.Under a guiding action by rotation of the balls 32, the movable section18 is made displaceable in the direction of the arrow A with respect tothe fixed section 14.

Roughly rectangular shaped permanent magnets 16 a, 16 b are arranged ona lower surface of the slide table 46 confronting the coil 12 at asubstantially central portion in the widthwise direction of the slidetable 46. Stated otherwise, the permanent magnets 16 a, 16 b aredisposed on a side of the slide table 46 that faces the fixed section14. The permanent magnets 16 a, 16 b are separated a predetermineddistance from each other. Sizes of the permanent magnets 16 a, 16 b areset to be smaller than the size of the coil 12. Although in the drawingstwo permanent magnets 16 a, 16 b are shown, only one, or three permanentmagnets may be provided. The plate shaped member 70 is affixed to an endportion in the direction of the arrow A1 of the slide table 46 throughscrews 68.

On opposite end sides of the slide table 46, a plurality of screw holes78 are formed along the thickness direction thereof. The slide table 46is capable of being affixed to another member by unillustrated screws,which are screw-inserted into each of the screw holes 78. On the otherhand, on a side surface in the direction of the arrow A2 of the endblock 72, unillustrated screw holes are formed along the thicknessdirection of the end block 72. By means of screws, which arescrew-inserted into the screw holes, the end block can be affixed toanother member.

The stopper 73 is disposed on a lower surface of the slide table 46 inthe vicinity of the permanent magnet 16 a. By abutment of the stopper 73against a side surface in the direction of the arrow A1 of the stopper60, displacement of the slide table 46 in the direction of the arrow A2is prevented.

The ball latch members 52, 56, the stoppers 60, 73, the plate shapedmember 70, the end block 72, and the screws 44, 54, 58, 62, 68 areconstituted from non-magnetic materials. The balls 32 may be magnetic ornon-magnetic. Further, magnetic balls 32 (first rolling bodies) andnon-magnetic (e.g., resin material) balls 32 (second rolling bodies) maybe arranged alternately along the direction of the arrow A.

In the linear electromagnetic actuator 10, in the case that the slidetable 46 is displaced in the direction of the arrow A while being guidedby the plurality of balls 32, although the balls 32 generally rotate inthe same direction, at surfaces where each of adjacent balls 32 comeinto contact with each other, the balls 32 tend to rotate in oppositedirections. Consequently, high frictional resistance is generatedbetween each of the balls 32 and positional slippage of the balls 32occurs. Thus, there is a possibility that the slide table 46 cannot bedisplaced smoothly. Accordingly, by arranging magnetic balls 32 andnon-magnetic balls 32 alternately, frictional resistance betweenadjacent balls 32 is suppressed, and the slide table 46 can be displacedsmoothly.

Further, among each of the balls 32, by making at least a portion of theballs 32 from a magnetic material, generation of leaking magnetic fluxin spaces between the projections 28 a, 28 b and the projections 74 a,74 b can be suppressed.

In the linear electromagnetic actuator 10 having the structure describedabove, by changing the direction of current that energizes the coil 12,in accordance with the direction of current that flows through the coil12 and the magnetic flux generated in the linear electromagneticactuator 10, a thrust force (Lorentz force) in the direction of thearrow A is generated in the coil 12 based on Fleming's left-hand rule.By means of such a thrust force, the slide table 46 (i.e., the movablesection 18) is displaced. During displacement of the slide table 46,when residual magnetization is generated in the guide rail 20, brakingforces are generated which impede the thrust force of the slide table46. Below, the principles behind generation of such braking forces shallbe explained in greater detail.

FIGS. 5A to 5C are schematic views for explaining the principles bywhich braking forces are generated that impede the thrust force of theslide table 46. A movable section 100 includes a magnetizable materialbody 102 and permanent magnets 104. The permanent magnets 104 arearranged in confronting relation to another magnetizable material body106. The movable section 100 is moved in the directions of the arrow B(i.e., directions B1 and B2) above the magnetizable material body 106.

FIG. 5A shows magnetic poles, which are generated in the magnetizablematerial body 106 when the movable section 100 is stopped. When themovable section 100 is stopped, the magnetizable material body 106becomes magnetized by the permanent magnets 104 and magnetic poles aregenerated in portions of the magnetizable material body 106 thatcorrespond to the permanent magnets 104. More specifically, a south pole(S-pole) is magnetized in a region of the magnetizable material body 106that confronts a north pole (N-pole) region of the permanent magnets104, whereas a north pole (N-pole) is magnetized in a region of themagnetizable material body 106 that confronts a south pole (S-pole)region of the permanent magnets 104.

FIG. 5B shows magnetic poles generated in the magnetizable material body106 by movement of the movable section 100 in the direction of the arrowB1, in a case where the coercive force of the magnetizable material body106 is small (i.e., the magnetizable material body 106 exhibits a lowcoercive force). Accompanying movement of the movable section 100, themagnetic poles in the magnetizable material body 106 also move. Thearrows in FIG. 5B extending from the permanent magnets 104 to themagnetizable material body 106 indicate the magnetic force, which isgenerated by the permanent magnets 104 and the magnetizable materialbody 106. In the case that the coercive force of the magnetizablematerial body 106 is small in this manner, since the generated magneticforce is substantially perpendicular to the movement direction of themovable section 100, it is difficult for forces to be generated in ahorizontal direction.

FIG. 5C shows magnetic poles generated in the magnetizable material body106 by movement of the movable section 100 in the direction of the arrowB1, in a case where the coercive force of the magnetizable material body106 is high (i.e., the magnetizable material body 106 exhibits a highcoercive force). In this case, even if the movable section 100 moves,the magnetized condition of the magnetizable material body 106, whichwas magnetized prior to movement, remains (i.e., residual magnetizationexists), and magnetic poles in the magnetized regions tend to remaintherein. As a result of such residual magnetization, the magnetic force,which is generated by the permanent magnets 104 and the magnetizablematerial body 106, works at an inclined direction with respect to thedirection of movement of the movable section 100, and forces (brakingforces) are generated in a direction opposite to the movement directionof the movable section 100. Consequently, while it would be preferableif the magnetizable material body 106 were a magnetizable material thatexhibits a small coercive force, a certain level of strength andstructural integrity are necessary for the guide rail 20 and the slidetable 46. Hence, because the guide rail 20 and the slide table 46 aresubjected to hardening by heat treatment, they become magnetizablematerials that exhibit a large coercive force.

Consequently, in the present invention, as described above, by providinga low coercive force magnetizable material body 36, which exhibits acoercive force smaller than the coercive force of the guide rail 20,between the permanent magnets 16 a, 16 b and the guide rail 20,generation of residual magnetization can be suppressed. As a resultthereof, generation of braking forces also can be suppressed. Statedotherwise, if the low coercive force magnetizable material body 36 isdisposed between the coil 12 and the guide rail 20, as a result of thelow coercive force magnetizable material body 36, it becomes harder forthe guide rail 20 to be magnetized. In this case, although the lowcoercive force magnetizable material body 36 becomes magnetized by thepermanent magnets 16 a, 16 b, residual magnetization either is notgenerated or development of residual magnetization in the low coerciveforce magnetizable material body 36 is small, and hence generation ofbraking forces can be suppressed.

FIG. 6 is a diagram showing the relationship between the position andmovement direction of the slide table 46 and deviation in thrust forceof the slide table 46, for a case in which the low coercive forcemagnetizable material body 36 is not disposed between the guide rail 20and the coil 12. The horizontal axis indicates the position of the slidetable 46, the positive (+) direction indicates a direction (advancementdirection) beyond a standard reference position, whereas the negative(−) direction indicates a direction (retraction direction) beyond thestandard reference position. Further, the vertical axis indicates thedeviation in thrust force of the slide table 46. This deviation is shownas a difference between a thrust force of the slide table 46 whenaffected by the influence of residual magnetization, and a thrust force(standard thrust force) of the slide table 46 for a case in which thethrust force is unaffected by the influence of residual magnetization.

As shown in FIG. 6, the braking force is enlarged and hysteresis isbrought about by residual magnetization of the guide rail 20. As aresult thereof, proper positioning of the slide table 46 is difficult toachieve, and alignment accuracy of the slide table 46 is deteriorated.

FIG. 7 is a diagram showing the relationship between the position andmovement direction of the slide table 46 and deviation in thrust forceof the slide table 46, for a case in which a low coercive forcemagnetizable material body 36 having a constant thickness (e.g., 0.5 mm)is disposed between the guide rail 20 and the coil 12. The vertical andhorizontal axes in FIG. 7 are the same as those in FIG. 6. As easilyunderstood from FIG. 7, when the low coercive force magnetizablematerial body 36 is disposed between the guide rail 20 and the permanentmagnets 16 a, 16 b, in comparison with FIG. 6, hysteresis is madesmaller. However, in this case, even though the low coercive forcemagnetizable material body 36 is provided, hysteresis is not completelyeliminated. As reasons to explain this phenomenon, even in the presenceof the low coercive force magnetizable material body 36 and merely bythe low coercive force thereof, some degree of residual magnetizationstill tends to be generated. Further, a small amount of residualmagnetization also is generated in the guide rail 20.

FIG. 8 is a diagram showing the relationship between the position andmovement direction of the slide table 46 and deviation in thrust forceof the slide table 46, for a case in which two low coercive forcemagnetizable material bodies 36 of the type shown in FIG. 7 are stackedand the two low coercive force magnetizable material bodies 36 aredisposed between the guide rail 20 and the coil 12. The vertical andhorizontal axes in FIG. 8 are the same as those in FIG. 6. As easilyunderstood from FIG. 8, when two stacked low coercive force magnetizablematerial bodies 36 are disposed between the guide rail 20 and thepermanent magnets 16 a, 16 b, in comparison with FIG. 7, the effect ofhysteresis becomes even smaller. This is because residual magnetizationgenerated in the low coercive force magnetizable material bodies 36 andthe guide rail 20 is even smaller compared to the case of FIG. 7.

In the forgoing manner, when the low coercive force magnetizablematerial body 36 is disposed between the permanent magnets 16 a, 16 band the guide rail 20, and the thickness thereof is made comparativelythick, residual magnetization generated in the guide rail 20 and the lowcoercive force magnetizable material body 36 can further be madesmaller, such that the thrust force of the slide table 46 approaches thestandard thrust force. Further, even without providing two stacked lowcoercive force magnetizable material bodies 36 of the type shown in FIG.7, if a single layer low coercive force magnetizable material body 36having a thickness of 1.00 mm is provided, the same effects as thoseshown in FIG. 8 can be obtained.

FIG. 9 is a diagram showing hysteresis in the thrust force due tomovement of the slide table 46 for the respective cases of FIGS. 6through 8. Hysteresis generated in the case that the low coercive forcemagnetizable material body 36 is not provided is more than three timesgreater compared to the case shown in FIG. 7, in which the low coerciveforce magnetizable material body 36 is provided. Further, when twolayers of the low coercive force magnetizable material body 36 shown inFIG. 7 are stacked, it is understood that hysteresis is madeapproximately ½ smaller compared to the case of providing only one layerof the low coercive force magnetizable material body 36. The thicknessof the low coercive force magnetizable material body 36 can be changedor varied depending on an allowable hysteresis value that can betolerated.

In this manner, by providing the low coercive force magnetizablematerial body 36 between the guide rail 20 and the permanent magnets 16a, 16 b, residual magnetization that tends to be generated in the guiderail 20 and the low coercive force magnetizable material body 36 can besuppressed. Since residual magnetization can be suppressed, a linearelectromagnetic actuator 10 can be provided, in which any influence onthe thrust force of the movable section 18 caused by such residualmagnetization can also be suppressed, the slide table 46 can be movedaccurately, and precision in positioning of the slide table 46 can beenhanced. The embodiment of the present invention described above may bemodified in the following ways:

(Modified Example 1) In the aforementioned embodiment, the coil 12 isdisposed on the guide rail 20 of the fixed section 14, and the permanentmagnets 16 a, 16 b are disposed on the slide table 46 of the movablesection 18. However, the permanent magnets 16 a, 16 b may be disposed onthe guide rail 20 of the fixed section 14, and the coil 12 may bedisposed on the slide table 46 of the movable section 18. In such acase, the low coercive force magnetizable material body 36 is disposedbetween the coil 12 and the slide table 46.

(Modified Example 2) In the aforementioned embodiment, in order tosuppress generation of braking forces that impede the thrust force ofthe slide table 46, the low coercive force magnetizable material body 36is disposed between the guide rail 20 and the coil 12. However, it isacceptable if the low coercive force magnetizable material body 36 isnot provided. In this case, over the guide rail 20, heat treatment isimplemented on surface portions thereof apart from those that confrontthe permanent magnets 16 a, 16 b. Stated otherwise, over the guide rail20, heat treatment is not implemented on surface portions thereof thatconfront the permanent magnets 16 a, 16 b, whereas heat treatment isimplemented with respect to regions apart therefrom (i.e., on theprojections 28 a and 28 b).

FIG. 10 is a perspective view of a linear electromagnetic actuator 10according to a second modified example, in which the view shows anexample of regions (shown in hatching) where heat treatment isimplemented on the guide rail 20. The regions 200 shown in hatchingindicate regions, over the guide rail 20, where heat treatment isimplemented thereon. In other words, other regions apart from theregions 200 (i.e., regions where hatching is not shown) indicate regionswhere heat treatment is not implemented.

Because the projections 28 a, 28 b carry out a role as guides to enablemovement of the slide table 46 in the direction of the arrow A, it ispreferable for the projections 28 a, 28 b to be hard. On the other hand,on surface portions of the guide rail 20 that confront the permanentmagnets 16 a, 16 b, in contrast to the projections 28 a, 28 b, there isno requirement for such surface portions to be hardened. Accordingly,heat treatment is implemented only with respect to regions (i.e., theprojections 28 a, 28 b) apart from surface portions of the guide rail 20that confront the permanent magnets 16 a, 16 b. Since heat treatment isnot implemented on surface portions of the guide rail 20 that confrontthe permanent magnets 16 a, 16 b, the coercive force within suchportions does not become high. Owing thereto, even if the low coerciveforce magnetizable material body 36 is not provided between the guiderail 20 and the coil 12, residual magnetization generated in the guiderail 20 can be suppressed, and generation of braking forces that couldotherwise impede the thrust force of the slide table 46 can also besuppressed.

Further, together with not implementing heat treatment with respect tosurface portions of the guide rail 20 that confront the permanentmagnets 16 a, 16 b, while implementing heat treatment with respect toother regions apart from those surface portions that confront thepermanent magnets 16 a, 16 b, the low coercive force magnetizablematerial body 36 may still be provided between the guide rail 20 and thecoil 12. In accordance therewith, residual magnetization can be evenfurther suppressed, and generation of braking forces that couldotherwise impede the thrust force of the slide table 46 can also besuppressed more fully.

(Modified Example 3) In the above modified example 2, over the guiderail 20, heat treatment is not implemented on surface portions thatconfront the permanent magnets 16 a, 16 b, however, among those surfaceportions that confront the permanent magnets 16 a, 16 b, it isacceptable if heat treatment is not implemented at least on regionsthereof that are not magnetized by the permanent magnets 16 a, 16 b. Inother words, even though surface portions may exist that confront thepermanent magnets 16 a, 16 b, so long as such surface portions are apartfrom regions that actually are magnetized by the permanent magnets 16 a,16 b, heat treatment may be implemented thereon.

FIG. 11 is an exploded perspective view of a linear electromagneticactuator 10 according to a third modified example, in which the viewshows an example of a region 202 on the guide rail 20 (shown inhatching) that is subject to being magnetized by the permanent magnets16 a, 16 b. More particularly, if heat treatment were implemented withrespect to the region 202, it would become easy for residualmagnetization to be generated by the permanent magnets 16 a, 16 b, andthe influence of such residual magnetization on the thrust force of themovable section 18 would be pronounced. Therefore, heat treatment shouldnot be implemented at least with respect to the region 202.

Further, among surface portions of the guide rail 20 that face thepermanent magnets 16 a, 16 b, it is acceptable if heat treatment is notimplemented at least with respect to regions that directly confront thepermanent magnets 16 a, 16 b. Further, among surface portions of theguide rail 20 that face the permanent magnets 16 a, 16 b, it isacceptable if, in addition to not implementing heat treatment withrespect to regions that are not magnetized by the permanent magnets 16a, 16 b, or with respect to regions that directly confront the permanentmagnets 16 a, 16 b, the low coercive force magnetizable material body 36still is provided between the guide rail 20 and the coil 12. Inaccordance therewith, residual magnetization can be even furthersuppressed, and generation of braking forces that could otherwise impedethe thrust force of the slide table 46 can also be suppressed morefully.

(Modified Example 4) In the above embodiments, explanations have beengiven using a card type of linear electromagnetic actuator 10 (i.e., alinear electromagnetic actuator with a thin flat profile). However, itgoes without saying that the invention is not limited solely to cardtype linear electromagnetic actuators. Further, although the inventionhas been explained with reference to a linear electromagnetic actuator10, the invention is not limited to a linear electromagnetic actuatorper se, but may also be applied to other (non-linear) types ofelectromagnetic actuators.

(Modified Example 5) So that adjacent balls 32 do not come into contactwith each other in spaces formed by the guide grooves 30 a, 30 b of theprojections 28 a and 28 b and the guide grooves 76 a, 76 b of theprojections 74 a and 74 b of the above embodiments, a retaining devicefor retaining the balls 32 may be provided. By such a retaining device,friction between the balls 32 themselves is avoided, and falling out ofballs 32 from the guide grooves 30 a, 30 b, 76 a, 76 b can be avoided.Such a retaining device may comprise a plate having multiple holesformed therein along the longitudinal direction, with the balls 32 beingfitted respectively into the holes of the retaining device.

Further, the retaining device may include a filament and a plurality oflow friction plates with holes opened in the centers thereof, andwherein holes also are provided in the centers of the balls 32. Suchplates are arranged between each of the balls 32, and by passing thefilament through the holes in each of the balls 32 and the plates, theretaining device is capable of retaining a plurality of balls 32 suchthat the balls 32 do not come into contact with each other.

(Modified Example 6) Features of the aforementioned modified examples 1to 5 may be arbitrarily combined with each other to result in otherembodiments.

It is a matter of course that the linear electromagnetic actuator 10according to the present invention is not limited to the embodimentsdescribed above. The linear electromagnetic actuator may be embodied inother various modified or improved forms, which would be readilyapparent to those skilled in the art, without deviating from the gist oressential characteristics of the present invention. It is understoodthat such modifications and improvements are included within thetechnical scope of the present invention, as set forth in the appendedclaims.

What is claimed is:
 1. An electromagnetic actuator, which causes arelative positional displacement between a first yoke supporting apermanent magnet and a second yoke supporting a coil arranged toconfront the permanent magnet, by means of a thrust force that isgenerated due to a current that flows through the coil, and wherein, ona surface of the second yoke that faces toward the permanent magnet, atleast a region thereof that is magnetized by the permanent magnetcomprises a region on which heat treatment to impart hardness is notimplemented.
 2. The electromagnetic actuator according to claim 1,wherein the surface of the second yoke that faces toward the permanentmagnet comprises a region on which heat treatment to impart hardness isnot implemented.
 3. The electromagnetic actuator according to claim 1,wherein: a first projection and a second projection are formed onopposite end sides of the second yoke facing toward the first yoke andprojecting along a displacement direction, the first yoke is disposedbetween the first projection and the second projection, and at least oneof the first projection and the second projection is subjected to heattreatment in order to impart hardness thereto.
 4. The electromagneticactuator according to claim 3, wherein: a third projection and a fourthprojection are formed on opposite end sides of the first yoke facingtoward the second yoke and projecting along the first projection and thesecond projection, the third projection and the fourth projection areseparated from the second yoke, a first guide member is interposedbetween the first projection and the third projection, and a secondguide member is interposed between the second projection and the fourthprojection.
 5. The electromagnetic actuator according to claim 4,wherein the first yoke, or the third projection and the fourthprojection of the first yoke, are subjected to heat treatment in orderto impart hardness thereto.
 6. The electromagnetic actuator according toclaim 1, wherein the heat treatment comprises any one of high frequencyhardening, carburizing and quenching, and vacuum hardening.
 7. Theelectromagnetic actuator according to claim 4, wherein a plurality ofrolling bodies are included within the first guide member and the secondguide member, at least a portion of the plurality of rolling bodiescomprising first rolling bodies made of a magnetic material.
 8. Theelectromagnetic actuator according to claim 7, wherein: the firstrolling bodies and second rolling bodies made of a non-magnetic materialare included within the first guide member and the second guide member,and the first rolling bodies and the second rolling bodies are disposedalternately along the displacement direction.
 9. The electromagneticactuator according to claim 1, wherein: the first yoke and the secondyoke are arranged in confronting relation to each other, the permanentmagnet is positioned on a side of the first yoke that faces the secondyoke, and the coil is positioned on a side of the second yoke that facesthe first yoke.